Development of highly-mechanically polished metal-substrate for neutron supermirrors

An aspherical supermirror is one of the most useful neutron-focusing optics. We aim to develop multiple aspherical supermirror devices using high-precision figured aspherical focusing supermirrors to focus neutron beams with high intensities, because multiple mirrors collect a very large beam divergence. Thin mirrors with a millimeter thickness are required to minimize the absorption loss of incident neutron beams since the thickness of a mirror shadows the reflective area of the other mirrors. However, it is difficult to fabricate thin mirror substrates with a form accuracy of sub-micrometer level by conventional machining. Conventional machining deforms a substrate by machining force and spring back after machining causes figure error. Furthermore the deposition of supermirrors deforms the mirror substrate by film stress. Thus, we developed a new process of fabricating a precise millimeterthick elliptical supermirror. This process consists of noncontact figuring by the numerically controlled local wet etching technique and the ion beam sputter deposition of NiC/Ti multilayers on both sides of the mirror substrate to compensate for film stress. In this paper, we report on the fabrication results and focusing performance of elliptical supermirrors with a thickness of 1.5 mm.